Thermal and oxidation stability of TixW1−x diffusion barriers investigated by soft and hard x-ray photoelectron spectroscopy
URL: https://aip.scitation.org/doi/10.1063/5.0048304
Authors: Kalha, Curran / Bichelmaier, Sebastian / Fernando, Nathalie / Berens, Judith / Thakur, Pardeep / Lee, Tien-Lin / Gutiérrez-Moreno, Julio / Mohr, Stephan / Ratcliff, Laura / Reisinger, Michael / Zechner, Johannes / Nelhiebel, Michael / Regoutz, Anna
Research Lines: Ab-Initio Electronic Structure Methods
Publication: Journal of Applied Physics
Place Published: AIP
Volume / Number: 129 / 195302
Paraules clau: Density functional theory, Ti, W, XPS